GB/T 16596-2019

Active

Specification for establishing a wafer coordinate system

确定晶片坐标系规范

Standard Type

GBT

ICS

29.045

CCS

H80

Status

Active

Issue Date

2019-03-25

Implementation

2020-02-01

Centralized Committee

国家标准委

Issuing Authority

国家市场监督管理总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the method for establishing a coordinate system on semiconductor wafers, defining the origin, axes, and orientation for precise location referencing. It is applied in the semiconductor manufacturing industry for wafer mapping, defect inspection, and lithography alignment to ensure consistent positional accuracy across processing and testing equipment.

Related Standards

GB/T 12964-2003 Monocrystalline silicon polished wafers GB/T 16596-1996 Specification for establishing a wafer coordinatesystem GB/T 16595-1996 Specification for a universal wafer grid GB/T 12965-2005 Monocrystalline silicon as cut slices and lapped slices GB/T 20230-2006 Indium phosphide single crystal GB/T 20229-2006 Gallium phosphide single crystal GB/T 20228-2006 Gallium arsenide single crystal GB/T 11071-2006 Zone-refined germanium ingot

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.